Double Beam Interference Femtosecond Laser Fabrication of Large Area Periodic Au Nanoparticle Arrays by Spatial Light Modulation
Download as PDF
DOI: 10.23977/EECTM2020.006
Corresponding Author
Xiaodan Ma
ABSTRACT
We propose a simple and efficient method for preparing large-area periodic Au nanoparticle arrays by dual-beam interference femtosecond laser by spatial light modulation. The Au film sample is double-exposed by successively loading the interference phases perpendicular to each other, then the large-area periodic Au nanoparticle array structure can be directly obtained, which only take one step. This method not only adjusts the period of the nanoparticle array through the phase period, but also flexibly regulates the size of the nanoparticles by the laser energy and the number of pulses, the minimum nanoparticle diameter achieved in this paper is 338 nm. In addition, we also analyse the mechanism of Au pattern morphological changes during the heating of the auxiliary muffle furnace, which provided a new idea for the preparation of gold nanoparticle arrays.
KEYWORDS
Femtosecond laser, au nanoparticle array, spatial light modulation, double beam interference