Simulation Study on the Gold Wire Bonding Reliability of MEMS Pressure Chips Based on a Detachable Core Package Structure
DOI: 10.23977/jeeem.2026.090115 | Downloads: 5 | Views: 49
Author(s)
Xiongkai Dang 1, Lijun Yang 1, Shubin Zhang 1, Baolong Su 1, Ziqi Liu 1
Affiliation(s)
1 School of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi'an, China
Corresponding Author
Xiongkai DangABSTRACT
To address the issues of non-adjustable gold wire bonding height difference, low bonding reliability, and difficulty in chip replacement associated with the planar packaging of MEMS pressure chips in conventional pressure scanning valves, this paper proposes a detachable core-body package structure. By adjusting the PCB thickness to vary the vertical distance between bonding points, the stress and deformation during gold wire bonding are optimized. A circular washer is used as an intermediate support for the pressure chip, which is then secured onto the core-body structural component via a core screw, enabling rapid replacement of individual pressure chips. Using finite element analysis, the equivalent stress and deformation of the gold wire under thermal cycling loads (−40 °C to 125 °C) were evaluated for different bonding point height difference. Results show that the maximum equivalent stress occurs at the neck region of the first bond and increases significantly with increasing vertical separation between the two bonds. The maximum deformation of the bonded wire appears at the midpoint along the wire arc length, and the deformation varies over time. When H12 decreases from 0.6 mm to 0 mm, the peak equivalent stress reduces by 42%, and the wire deformation at high temperature decreases by 33.8%. Life prediction based on the Coffin-Manson model indicates a fatigue cycle life of approximately 1404 cycles under zero height difference bonding, providing theoretical support for highly reliable packaging design in pressure scanning valves.
KEYWORDS
MEMS pressure chip; Gold wire bonding; Detachable core package; Finite element simulation; Reliability analysisCITE THIS PAPER
Xiongkai Dang, Lijun Yang, Shubin Zhang, Baolong Su, Ziqi Liu. Simulation Study on the Gold Wire Bonding Reliability of MEMS Pressure Chips Based on a Detachable Core Package Structure. Journal of Electrotechnology, Electrical Engineering and Management (2026). Vol. 9, No.1, 120-128. DOI: http://dx.doi.org/10.23977/jeeem.2026.090115.
REFERENCES
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